PLASMA ASSISTED DEPOSITION TECHNIQUES AND SYNTHESIS OF NOVEL MATERIALS

被引：14

作者：

DESHPANDEY, C

BUNSHAH, RF

机构：

[1] Univ of California, United States

来源：

THIN SOLID FILMS | 1988年 / 163卷

关键词：

We are currently engaged in a variety of projects related to material synthesis and thin films. Most of the work in our laboratory is supported by grants from federal agencies such the National Science Foundation; National Aeronautics and Space Administranon; Department of Energy; Department of Defense etc. and by contracts from various industries. We gratefully acknowledge the support and the interest of all our sponsors; which are crucial for ongoing and future research in our group;

D O I：

10.1016/0040-6090(88)90418-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：131 / 147

页数：17

共 26 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
AISENBERG, S
CHABOT, R
[J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +
[2] Bunshah R. F., 1982, DEPOSITION TECHNOLOG
[3] PLASMA ASSISTED PHYSICAL VAPOR-DEPOSITION PROCESSES - A REVIEW
BUNSHAH, RF
DESHPANDEY, CV
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1985, 3 (03): : 553 - 560
[4] BUNSHAH RF, 1984, IND MATERIALS SCI EN
[5] BUNSHAH RF, 1986, IN PRESS NOV GAD LAN
[6] Chopra K.L., 1983, THIN FILM DEVICE APP
[7] TRANSPARENT CONDUCTORS - A STATUS REVIEW
CHOPRA, KL
MAJOR, S
PANDYA, DK
[J]. THIN SOLID FILMS, 1983, 102 (01) : 1 - 46
[8] SYNTHESIS OF CUBIC BORON-NITRIDE FILMS BY ACTIVATED REACTIVE EVAPORATION OF H3BO3
CHOPRA, KL
AGARWAL, V
VANKAR, VD
DESHPANDEY, CV
BUNSHAH, RF
[J]. THIN SOLID FILMS, 1985, 126 (3-4) : 307 - 312
[9] Cornu A., 1966, COMPILATION MASS SPE
[10] DESHPANDEY C, 1984, THIN SOLID FILMS, V118, P293

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