ACCURATE PHASE CAPACITANCE SPECTROSCOPY OF TRANSITION-METAL SILICON DIODES

被引:17
作者
EVANS, HL [1 ]
WU, X [1 ]
YANG, ES [1 ]
HO, PS [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.95566
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:486 / 488
页数:3
相关论文
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