See results using high energy ions

被引:30
作者
Duzellier, S
Falguere, D
Mouliere, L
Ecoffet, R
Buisson, J
机构
[1] CTR NATL ETUD SPATIALES,F-31055 TOULOUSE,FRANCE
[2] CENS,CEA,LETI,DEIN,F-91191 GIF SUR YVETTE,FRANCE
关键词
D O I
10.1109/23.488781
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
SEE data on SRAMs and DRAMs, obtained with low and high energy ions, are presented. The global response of these devices remained coherent using low or high energy beams (angle effects, pattern influences, multiple-bit error proportion...), but, discrepancies appeared, in some cases, in the threshold part of the sensitivity curves. These anomalies seem in relation with a track structure.
引用
收藏
页码:1797 / 1802
页数:6
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