ION-ASSISTED LASER DEPOSITION OF CAF2 THIN-FILMS AT LOW-TEMPERATURES

被引:16
作者
GLUCK, NS
SANKUR, H
GUNNING, WJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 05期
关键词
D O I
10.1116/1.576303
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:2983 / 2987
页数:5
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