OXIDE MICRO-PRECIPITATES IN AS-GROWN CZ SILICON

被引:51
作者
INOUE, N
OSAKA, J
WADA, K
机构
关键词
D O I
10.1149/1.2123679
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:2780 / 2788
页数:9
相关论文
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