PIEZOELECTRIC THIN-FILMS OF RF-SPUTTERED BI12PBO19

被引：11

作者：

MITSUYU, T ^{[1
]}

WASA, K ^{[1
]}

HAYAKAWA, S ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD,MAT RES LAB,KADOMA,OSAKA,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 07期

关键词：

D O I：

10.1063/1.323068

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2901 / 2902

页数：2

共 13 条

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[2]

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[3]

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[4]

FOSTER NF, 1970, HDB THIN FILM TECHNO, P16

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[6] STRUCTURES AND ELECTRICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY LOW PRESSURE SPUTTERING SYSTEM [J].

HADA, T ;

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HAYAKAWA, S .

THIN SOLID FILMS, 1971, 7 (02) :135-&

[7]

HICKERNELL F, 1975, 1975 ULTR S P, P223

[8] ACOUSTIC PROPERTIES OF OXIDE-FILMS AND THEIR APPLICATION TO ACOUSTIC SURFACE-WAVE DEVICES [J].

HICKERNELL, FS .

JOURNAL OF SOLID STATE CHEMISTRY, 1975, 12 (3-4) :225-231

[9] THEORY OF INTERDIGITAL COUPLERS ON NONPIEZOELECTRIC SUBSTRATES [J].

KINO, GS ;

WAGERS, RS .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (04) :1480-1488

[10] POLYMORPHISM OF BISMUTH SESQUIOXIDE .2. EFFECT OF OXIDE ADDITIONS ON POLYMORPHISM OF BI2O3 [J].

LEVIN, EM ;

ROTH, RS .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1964, A 68 (02) :197-+

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