EFFICIENCY ENHANCEMENT OF MONTE-CARLO SIMULATION OF PARTICLE-BEAM INTERACTION BY SEPARATION OF STOCHASTIC AND CONTINUUM CONTRIBUTIONS

被引:4
作者
GROVES, TR
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词
D O I
10.1116/1.587536
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:3483 / 3488
页数:6
相关论文
共 11 条
[1]  
ABROMOWITZ M, 1972, HDB MATH FUNCTIONS, P590
[2]   PARTICLE-PARTICLE INTERACTION EFFECTS IN IMAGE PROJECTION LITHOGRAPHY SYSTEMS [J].
BERGER, SD ;
EAGLESHAM, DJ ;
FARROW, RC ;
FREEMAN, RR ;
KRAUS, JS ;
LIDDLE, JA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2294-2298
[3]  
CREWE AV, 1978, OPTIK, V52, P337
[4]  
GLASER W, 1952, GRUNDLAGEN ELEKTRONE, P25
[5]  
GRADSHTEYN IS, 1980, TABLE INTEGRALS SERI, P154
[6]   ELECTRON-BEAM BROADENING EFFECTS CAUSED BY DISCRETENESS OF SPACE-CHARGE [J].
GROVES, T ;
HAMMOND, DL ;
KUO, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1680-1685
[7]   ENERGY BROADENING IN ELECTRON-BEAMS - A COMPARISON OF EXISTING THEORIES AND MONTE-CARLO SIMULATION [J].
JANSEN, GH ;
GROVES, TR ;
STICKEL, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :190-193
[8]  
JANSEN GH, 1990, ADV ELECTRONICS EL S, V21, P423
[9]  
JANSEN GH, 1984, P MICROCIRCUIT ENG, P167
[10]  
JANSEN GH, 1990, ADV ELECTRONICS ELEC, V21