SPUTTERING OF GRAPHITE WITH LIGHT-IONS AT ENERGIES BETWEEN 20-EV AND 1000-EV

被引:60
作者
ROTH, J
BOHDANSKY, J
机构
关键词
D O I
10.1016/0168-583X(87)90484-8
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
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页码:549 / 551
页数:3
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