ION-BEAM SYSTEM FOR IMPLANTING INDUSTRIAL-PRODUCTS OF VARIOUS SHAPES

被引：6

作者：

DENHOLM, AS

WITTKOWER, AB

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(85)90614-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：88 / 93

页数：6

共 5 条

CHARTER, SJB ;

THOMPSON, LR ;

DEARNALEY, G .

[2]

Grabowski K. S., 1983, Ion Implantation: Equipment and Techniques. Proceedings of the Fourth International Conference, P364

[3]

Hirvonen JK., 1983, MAT MODIFICATION ION, P323, DOI [10.1007/978-1-4613-3733-1_12, DOI 10.1007/978-1-4613-3733-1_12]

[4] UNIFORM LARGE AREA BEAM SCANNING WITH A FREEMAN SOURCE [J].

KANTER, M ;

WITTKOWER, A .

[5] SOME PRACTICAL ASPECTS OF ION-IMPLANTATION FOR WEAR REDUCTION [J].

WITTKOWER, A ;

HIRVONEN, JK .