SCALING PROPERTIES OF THE SHADOWING MODEL FOR SPUTTER DEPOSITION

We analyze a deterministic, one-dimensional solid-on-solid model for sputter deposition where the local growth rate is a function V(theta) of the exposure angle theta. For long times an algebraic height distribution N(h) approximately h-(1+p) develops, where the exponent p depends on the behavior of V(theta) close to theta=pi and the extremal statistics of the substrate roughness. Analytic predictions for p, based on scaling arguments, are verified by large-scale simulations using a hierarchical algorithm.