A SYSTEMS-APPROACH TO 1-MU-M NMOS

被引:16
作者
LEPSELTER, MP
ALLES, DS
LEVINSTEIN, HJ
SMITH, GE
WATSON, HA
机构
[1] BELL TEL LABS INC, DEPT LITHOG TECHNOL, MURRAY HILL, NJ 07974 USA
[2] BELL TEL LABS INC, DEPT LITHOG SYST DEV, MURRAY HILL, NJ 07974 USA
[3] BELL TEL LABS INC, DEPT MAT TECHNOL, MURRAY HILL, NJ 07974 USA
[4] BELL TEL LABS INC, DEPT MOS DEVICE, MURRAY HILL, NJ 07974 USA
关键词
D O I
10.1109/PROC.1983.12646
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:640 / 656
页数:17
相关论文
共 37 条
[1]  
ADAMS AC, 1981, SOLID STATE TECHNOL, V24, P178
[2]   PARAMETER SELECTION FOR NEWTON-LIKE METHODS APPLICABLE TO NON-LINEAR PARTIAL-DIFFERENTIAL EQUATIONS [J].
BANK, RE ;
ROSE, DJ .
SIAM JOURNAL ON NUMERICAL ANALYSIS, 1980, 17 (06) :806-822
[3]   A FINE-LINE NMOS IC FOR RASTER-SCAN CONTROL OF A 500-MHZ ELECTRON-BEAM DEFLECTION SYSTEM [J].
BAYRUNS, RJ ;
SUCIU, PI ;
WITTWER, NC ;
FRASER, DL ;
FULS, EN ;
KUSHNER, RA ;
ASHLEY, FR ;
GERE, EA .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (04) :737-744
[4]   GENERALIZED GUIDE FOR MOSFET MINIATURIZATION [J].
BREWS, JR ;
FICHTNER, W ;
NICOLLIAN, EH ;
SZE, SM .
ELECTRON DEVICE LETTERS, 1980, 1 (01) :2-4
[5]   PERFORMANCE LIMITS IN 1-1 UV PROJECTION LITHOGRAPHY [J].
BRUNING, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1925-1928
[6]  
FELDMAN M, 1979, J VAC SCI TECHNOL, V9, P1229
[7]   3-DIMENSIONAL NUMERICAL MODELING OF SMALL-SIZE MOSFETS [J].
FICHTNER, W ;
JOHNSTON, RL ;
ROSE, DJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (10) :1215-1216
[8]  
FICHTNER W, IEEE IEDM 1982 TECH, P722
[9]  
FICHTNER W, 1982, 1982 IEDM SAN FRANC
[10]  
FICHTNER W, 1982, MAY EL SOC SPRING M