CONTACTLESS ELECTRICAL TESTING OF LARGE AREA SPECIMENS USING ELECTRON-BEAMS

被引：24

作者：

PFEIFFER, HC

LANGNER, GO

STICKEL, W

SIMPSON, RA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571159

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1014 / 1018

页数：5

共 12 条

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