HYDROGEN PROFILING BY PROTON PROTON-SCATTERING

被引:20
作者
WILLEMSEN, MFC
THEUNISSEN, AML
KUIPER, AET
机构
关键词
D O I
10.1016/0168-583X(86)90349-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:492 / 494
页数:3
相关论文
共 5 条
[1]   NONDESTRUCTIVE ANALYSIS FOR TRACE AMOUNTS OF HYDROGEN [J].
COHEN, BL ;
DEGNAN, JH ;
FINK, CL .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (01) :19-&
[2]   TECHNIQUE FOR PROFILING H-1 WITH 2.5-MEV VANDEGRAAFF ACCELERATORS [J].
DOYLE, BL ;
PEERCY, PS .
APPLIED PHYSICS LETTERS, 1979, 34 (11) :811-813
[3]  
Habraken F. H. P. M., 1983, Insulating Films on Semiconductors. Proceedings of the International Conference INFOS 83, P121
[4]   HYDROGEN DEPTH PROFILING USING SIMS - PROBLEMS AND THEIR SOLUTIONS [J].
MAGEE, CW ;
BOTNICK, EM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (01) :47-52
[5]  
PADUSCHEK P, 1980, APPL PHYS LETT, V36, P1