GROWTH-MODEL FOR THE MOLECULAR-BEAM EPITAXIAL-GROWTH OF CDTE USING REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION OSCILLATION MEASUREMENTS

被引：15

作者：

BEHR, T

LITZ, T

WAAG, A

LANDWEHR, G

机构：

[1] Physikalisches Institut, Universität Würzburg

来源：

JOURNAL OF CRYSTAL GROWTH | 1995年 / 156卷 / 03期

关键词：

D O I：

10.1016/0022-0248(95)00288-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We have investigated the molecular beam epitaxial growth of CdTe on (001)-oriented CdTe substrates. Reflection high energy electron diffraction (RHEED) oscillations were observed to measure the growth and desorption rate as a function of flux and temperature. Based on these results a model was developed which describes the decrease of growth rate with increasing substrate temperature taking into account the desorption from a physisorbed and a chemisorbed state. The desorption energy of the chemisorbed and also of the physisorbed state was calculated.

引用

收藏

页码：206 / 211

页数：6

相关论文

共 16 条

[1] SURFACE STOICHIOMETRY AND REACTION-KINETICS OF MOLECULAR-BEAM EPITAXIALLY GROWN (001) CDTE SURFACES [J].

BENSON, JD ;

WAGNER, BK ;

TORABI, A ;

SUMMERS, CJ .

APPLIED PHYSICS LETTERS, 1986, 49 (16) :1034-1036

[2] COMPACT BLUE LASERS IN THE NEAR FUTURE [J].

BHARGAVA, RN .

JOURNAL OF CRYSTAL GROWTH, 1992, 117 (1-4) :894-901

[3] PHOTOASSISTED MOLECULAR-BEAM EPITAXY OF WIDE GAP II-VI HETEROSTRUCTURES [J].

BICKNELLTASSIUS, RN ;

WAAG, A ;

WU, YS ;

KUHN, TA ;

OSSAU, W .

JOURNAL OF CRYSTAL GROWTH, 1990, 101 (1-4) :33-41

[4] PARTIAL PRESSURES + GIBBS FREE ENERGY OF FORMATION FOR CONGRUENTLY SUBLIMING CDTE(C) [J].

BREBRICK, RF ;

STRAUSS, AJ .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1964, 25 (12) :1441-&

[5] OBSERVATION OF DIFFERENT REFLECTED HIGH-ENERGY ELECTRON-DIFFRACTION PATTERNS DURING ATOMIC LAYER EPITAXY GROWTH OF CDTE EPILAYERS [J].

FASCHINGER, W ;

JUZA, P ;

SITTER, H .

JOURNAL OF CRYSTAL GROWTH, 1991, 115 (1-4) :692-697

[6] TIME-RESOLVED PHOTOLUMINESCENCE STUDIES OF PERPENDICULAR TRANSPORT IN CDTE/CD1-XMNXTE SHORT-PERIOD SUPERLATTICES [J].

HELLMANN, R ;

POHLMANN, A ;

GOBEL, EO ;

YAKOVLEV, DR ;

WAAG, A ;

BICKNELLTASSIUS, RN ;

LANDWEHR, G .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (08) :5272-5274

[7] PROPERTIES OF DOPED CDTE-FILMS GROWN BY PHOTOASSISTED MOLECULAR-BEAM EPITAXY [J].

HWANG, S ;

HARPER, RL ;

HARRIS, KA ;

GILES, NC ;

BICKNELL, RN ;

COOK, JW ;

SCHETZINA, JF ;

CHU, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2821-2825

[8] LAYER-BY-LAYER SUBLIMATION OBSERVED BY REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION INTENSITY OSCILLATION IN A MOLECULAR-BEAM EPITAXY SYSTEM [J].

KOJIMA, T ;

KAWAI, NJ ;

NAKAGAWA, T ;

OHTA, K ;

SAKAMOTO, T ;

KAWASHIMA, M .

APPLIED PHYSICS LETTERS, 1985, 47 (03) :286-288

[9] GROWTH MECHANISMS OF CDTE DURING MOLECULAR-BEAM EPITAXY [J].

LITZ, T ;

BEHR, T ;

HOMMEL, D ;

WAAG, A ;

LANDWEHR, G .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (08) :3492-3496

[10] MOLECULAR-BEAM EPITAXIAL-GROWTH MECHANISM OF ZNSE EPILAYERS ON (100) GAAS AS DETERMINED BY REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION, TRANSMISSION ELECTRON-MICROSCOPY AND X-RAY-DIFFRACTION [J].

RUPPERT, P ;

HOMMEL, D ;

BEHR, T ;

HEINKE, H ;

WAAG, A ;

LANDWEHR, G .

JOURNAL OF CRYSTAL GROWTH, 1994, 138 (1-4) :48-54