BROADLY-TUNABLE RESONANT-CAVITY LIGHT-EMITTING DIODE

被引:26
作者
LARSON, MC
HARRIS, JS
机构
[1] Solid-State Electronics Laboratory, Stanford University, Stanford, CA 94305
关键词
D O I
10.1109/68.473467
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Microelectromechanical wavelength tuning is demonstrated for the first time in a resonant-cavity light-emitting diode. The device utilizes a deformable-membrane top mirror suspended by an air gap above a diode-active region and bottom mirror. Applied membrane-substrate bias produces an electrostatic force which reduces the air-gap thickness, and therefore, the resonant wavelength. We report broad tunability of nearly 40 mn and spectral linewidths as narrow as 1.9 mn (2.6 meV) for operation near 950 mn.
引用
收藏
页码:1267 / 1269
页数:3
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