BORON DOPING AND POST-HYDROGENATION EFFECTS ON OPTICAL GAPS AND URBACH TAILS OF AMORPHOUS HYDROGENATED SILICON FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION

被引:7
作者
COULIBALY, SP [1 ]
DECHELLE, F [1 ]
BERGER, JM [1 ]
FERRATON, JP [1 ]
DONNADIEU, A [1 ]
MAGARINO, J [1 ]
KAPLAN, D [1 ]
机构
[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE
关键词
D O I
10.1016/0040-6090(84)90089-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:263 / 268
页数:6
相关论文
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