BORON DOPING EFFECT ON OPTICAL-PROPERTIES OF A-SI FILMS PREPARED BY CVD - POST-HYDROGENATED AND H-EXODIFFUSION STUDY

被引:7
作者
DONNADIEU, A
FERRATON, JP
COULIBALY, SP
ANCE, C
BERGER, JM
DECHELLE, F
机构
关键词
D O I
10.1016/0022-3093(83)90582-3
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:305 / 308
页数:4
相关论文
共 6 条
[1]   RETARDING CRYSTALLIZATION OF CVD AMORPHOUS-SILICON BY ALLOYING [J].
BOOTH, DC ;
ALLRED, DD ;
SERAPHIN, BO .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :213-218
[2]   DISORDER AND THE OPTICAL-ABSORPTION EDGE OF HYDROGENATED AMORPHOUS-SILICON [J].
CODY, GD ;
TIEDJE, T ;
ABELES, B ;
BROOKS, B ;
GOLDSTEIN, Y .
PHYSICAL REVIEW LETTERS, 1981, 47 (20) :1480-1483
[3]  
COULIBALY SP, UNPUB THIN SOLID FIL
[4]  
COULIBALY SP, UNPUB J NON CRYST SO
[5]   EFFECT OF TEMPERATURE ON THE OPTICAL-PROPERTIES OF AMORPHOUS-SILICON FILMS PREPARED BY VAPOR-PHASE DECOMPOSITION [J].
DIVRECHY, A ;
YOUS, B ;
BERGER, JM ;
FERRATON, JP ;
ROBIN, J ;
DONNADIEU, A .
THIN SOLID FILMS, 1981, 78 (03) :235-243
[6]   DOPING EFFECTS ON POST-HYDROGENATED CHEMICAL-VAPOR-DEPOSITED AMORPHOUS-SILICON [J].
MAGARINO, J ;
KAPLAN, D ;
FRIEDERICH, A ;
DENEUVILLE, A .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 45 (03) :285-306