EFFECT OF TEMPERATURE ON THE OPTICAL-PROPERTIES OF AMORPHOUS-SILICON FILMS PREPARED BY VAPOR-PHASE DECOMPOSITION

被引：13

作者：

DIVRECHY, A

YOUS, B

BERGER, JM

FERRATON, JP

ROBIN, J

DONNADIEU, A

机构：

来源：

THIN SOLID FILMS | 1981年 / 78卷 / 03期

关键词：

D O I：

10.1016/0040-6090(89)90589-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：235 / 243

页数：9

共 18 条

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