PLANAR 4-PROBE TEST STRUCTURE FOR MEASURING BULK RESISTIVITY

被引：26

作者：

BUEHLER, MG ^{[1
]}

THURBER, WR ^{[1
]}

机构：

[1] NBS,DIV ELECTR TECHNOL,SEMICONDUCTOR PROC SECT,WASHINGTON,DC 20234

来源：

关键词：

D O I：

10.1109/T-ED.1976.18518

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：968 / 974

页数：7

共 8 条

[1] MAGNETOCONDUCTIVE CORRECTION FACTORS FOR AN ISOTROPIC HALL PLATE WITH POINT SOURCES
BUEHLER, MG
PEARSON, GL
[J]. SOLID-STATE ELECTRONICS, 1966, 9 (05) : 395 - &
[2] BUEHLER MG, 1976, NBS40022 SPEC PUBL
[3] SWARTZENDRUBER LJ, AD683408
[4] SWARTZENDRUBER LJ, 1964, NBS199 TECH NOT
[5] THE POTENTIALS OF INFINITE SYSTEMS OF SOURCES AND NUMERICAL SOLUTIONS OF PROBLEMS IN SEMICONDUCTOR ENGINEERING
UHLIR, A
[J]. BELL SYSTEM TECHNICAL JOURNAL, 1955, 34 (01): : 105 - 128
[6] RESISTIVITY MEASUREMENTS ON GERMANIUM FOR TRANSISTORS
VALDES, LB
[J]. PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1954, 42 (02): : 420 - 427
[7] 4 POINT SHEET RESISTIVITY TECHNIQUES
ZRUDSKY, DR
BUSH, HD
FASSETT, JR
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (07) : 885 - &
[8] 1975, ANNUAL BOOK ASTM 43