4 POINT SHEET RESISTIVITY TECHNIQUES

被引：19

作者：

ZRUDSKY, DR

BUSH, HD

FASSETT, JR

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1966年 / 37卷 / 07期

关键词：

D O I：

10.1063/1.1720355

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：885 / &

共 13 条

[1] AN AC SILICON RESISTIVITY METER [J].

ALLEN, CC ;

RUNYAN, WR .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1961, 32 (07) :824-&

[2] A CONTINUOUS-READING 4-POINT RESISTIVITY PROBE [J].

BRICE, JC ;

STRIDE, AA .

SOLID-STATE ELECTRONICS, 1960, 1 (03) :245-245

[3] ON THE MEASUREMENT OF CROSS-SECTIONAL RESISTIVITY VARIATION ON SEMICONDUCTOR CRYSTALS [J].

GERGELY, G ;

HANTAY, O .

SOLID-STATE ELECTRONICS, 1962, 5 (NOV-D) :416-417

[4] 4-POINT PROBE FOR MEASURING RESISTIVITY OF SMALL SAMPLES [J].

KENNEDY, JK .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1962, 33 (07) :773-&

[5] MEASUREMENT OF THE SHEET RESISTIVITY OF A SQUARE WAFER WITH A SQUARE 4-POINT PROBE [J].

KEYWELL, F ;

DOROSHESKI, G .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1960, 31 (08) :833-837

[6]

KLIMENKO AG, 1964, INSTR EXPER TECH, V5, P991

[7] AN AC BRIDGE FOR SEMICONDUCTOR RESISTIVITY MEASUREMENTS USING A 4-POINT PROBE [J].

LOGAN, MA .

BELL SYSTEM TECHNICAL JOURNAL, 1961, 40 (03) :885-+

[8] MINIMAL MAINTENANCE PROBE FOR PRECISE RESISTIVITY MEASUREMENT OF SEMICONDUCTORS [J].

PAULNACK, CL ;

CHAPLIN, NJ .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1962, 33 (08) :873-&

[9] MEASUREMENT OF SHEET RESISTIVITIES WITH THE 4-POINT PROBE [J].

SMITS, FM .

BELL SYSTEM TECHNICAL JOURNAL, 1958, 37 (03) :711-718

[10] RESISTIVITY MEASUREMENTS ON GERMANIUM FOR TRANSISTORS [J].

VALDES, LB .

PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1954, 42 (02) :420-427

← 1 2 →