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A STUDY OF HETEROGENEOUS NIOBIUM CARBONITRIDE THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING

被引：3
作者：
AUBERT, A
SPITZ, J
机构：
来源：
THIN SOLID FILMS | 1982年 / 96卷 / 03期
关键词：
D O I：
10.1016/0040-6090(82)90243-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：191 / 198
页数：8
相关论文
共 8 条
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AUBERT A, 1975, VIDE, V175, P1
[2]  
ECONOMY J, 1972, AD751545
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JONES, CK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :17-19
[4]  
OYA G, 1970, J VACUUM SCI TECH, V7, P544
[5]   PROPERTIES AND STRUCTURE OF THIN-LAYERS OF NIOBIUM NITRIDE MADE BY REACTIVE CATHODIC PULVERIZATION .2. CRYSTALLOGRAPHIC STUDY BY MICROSCOPY AND ELECTRON-DIFFRACTION [J].
PELISSIER, J .
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[6]   PROPERTIES AND STRUCTURE OF THIN-LAYERS OF NIOBIUM NITRIDE MADE BY REACTIVE CATHODIC PULVERIZATION .1. PREPARATION AND PROPERTIES [J].
SPITZ, J ;
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AUBERT, A .
JOURNAL OF THE LESS-COMMON METALS, 1974, 35 (02) :181-192
[7]  
SPITZ J, 1975, 5TH CVD C EL SC, P258
[8]   SUPERCONDUCTING PROPERTIES AND STRUCTURE OF REACTIVELY SPUTTERED NIOBIUM CARBIDE THIN-FILMS [J].
SPITZER, HJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :20-21
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