PROPERTIES AND STRUCTURE OF THIN-LAYERS OF NIOBIUM NITRIDE MADE BY REACTIVE CATHODIC PULVERIZATION .1. PREPARATION AND PROPERTIES

被引:12
作者
SPITZ, J [1 ]
CHEVALLIER, J [1 ]
AUBERT, A [1 ]
机构
[1] CEN, COMM ENERGIE ATOM, DEPT MET, 38041 GRENOBLE, FRANCE
来源
JOURNAL OF THE LESS-COMMON METALS | 1974年 / 35卷 / 02期
关键词
D O I
10.1016/0022-5088(74)90230-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:181 / 192
页数:12
相关论文
共 13 条
[1]   RELATIONSHIP BETWEEN STRUCTURE AND SPUTTERING PARAMETERS IN NBN FILMS [J].
ALESSANDRINI, EI ;
SADAGOPAN, V ;
LAIBOWITZ, RB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01) :188-+
[2]  
BAUER G, 1966, Z ANORG ALLG CHEM, V348, P298
[3]   PREPARATION STRUCTURE AND PROPERTIES OF SPUTTERED HIGHLY NITRIDED TANTALUM FILMS [J].
COYNE, HJ ;
TAUBER, RN .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (12) :5585-+
[4]   HIGH FIELD PROPERTIES OF PURE NIOBIUM NITRIDE THIN FILMS [J].
DEIS, DW ;
GAVALER, JR ;
HULM, JK ;
JONES, CK .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (05) :2153-+
[5]   SPUTTERING TECHNIQUES FOR CONTROLLING COMPOSITION OF THIN FILMS OF HIGH-TC SUPERCONDUCTING COMPOUNDS [J].
GAVALER, JR ;
JANOCKO, MA ;
HULM, JK ;
JONES, CK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01) :180-+
[6]  
Geballe T H., 1966, Physics Physique Fizika, V2, P293, DOI [10.1103/PhysicsPhysiqueFizika.2.293, DOI 10.1103/PHYSICSPHYSIQUEFIZIKA.2.293]
[7]  
Giorgi A L., 1968, Proc. Br. Ceram. Soc, V10, P183
[8]   SUPERCONDUCTING TRANSITION TEMPERATURES OF RF SPUTTERED NBN FILMS [J].
KESKAR, KS ;
YAMASHITA, T ;
ONODERA, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (03) :370-+
[9]   SUPERCONDUCTIVE TRANSITION TEMPERATURES OF REACTIVELY SPUTTERED NIOBIUM FILMS [J].
MITSZUOKA, T ;
YAMASHITA, T ;
NAKAZAWA, T ;
ONODERA, Y ;
SAITO, Y ;
ANAYAMA, T .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (10) :4788-+
[10]  
OYA G, 1970, J VACUUM SCI TECH, V7, P544