共 13 条
[1]
RELATIONSHIP BETWEEN STRUCTURE AND SPUTTERING PARAMETERS IN NBN FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1971, 8 (01)
:188-+
[2]
BAUER G, 1966, Z ANORG ALLG CHEM, V348, P298
[5]
SPUTTERING TECHNIQUES FOR CONTROLLING COMPOSITION OF THIN FILMS OF HIGH-TC SUPERCONDUCTING COMPOUNDS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1971, 8 (01)
:180-+
[6]
Geballe T H., 1966, Physics Physique Fizika, V2, P293, DOI [10.1103/PhysicsPhysiqueFizika.2.293, DOI 10.1103/PHYSICSPHYSIQUEFIZIKA.2.293]
[7]
Giorgi A L., 1968, Proc. Br. Ceram. Soc, V10, P183
[10]
OYA G, 1970, J VACUUM SCI TECH, V7, P544