PROPERTIES OF TIC-TIN DOUBLE-LAYER COATINGS PREPARED BY REACTIVE RF SPUTTERING

被引：3

作者：

KAWAMOTO, O

HIROHATA, Y

MOHRI, M

YAMASHINA, T

机构：

来源：

JOURNAL OF NUCLEAR MATERIALS | 1985年 / 133卷 / AUG期

关键词：

D O I：

10.1016/0022-3115(85)90252-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：760 / 764

页数：5

共 20 条

[1] SYNTHESIS OF TITANIUM CARBONITRIDE FILMS BY PHYSICAL VAPOR-DEPOSITION AND THEIR STRUCTURE [J].

ENOMOTO, Y ;

YAMANAKA, K .

THIN SOLID FILMS, 1981, 86 (01) :L201-L203

[2]

HIROHATA Y, 1984, J NUCL MATER, V122, P1160

[3] HARDNESS MEASUREMENTS OF THIN-FILMS [J].

JONSSON, B ;

HOGMARK, S .

THIN SOLID FILMS, 1984, 114 (03) :257-269

[4] INITIAL TESTING OF TIB2 AND TIC COATED LIMITERS IN ISX-B [J].

LANGLEY, RA ;

EMERSON, LC ;

WHITLEY, JB ;

MULLENDORE, AW .

JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) :479-485

[5]

MAKOWITZ H, 1984, J NUCL MATER, V122, P1170

[6]

MOROZUMI S, 1981, J NUCL MATER, V103, P279

[7]

NAKAMURA H, 1982, JAERIM82065

[8] THERMAL-SHOCK TESTING OF LOW-Z COATINGS FOR JT-60 [J].

NAKAMURA, K ;

YAMADA, R ;

SAIDOH, M ;

MURAKAMI, Y .

JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :852-855

[9] DIFFUSION BARRIERS IN THIN-FILMS [J].

NICOLET, MA .

THIN SOLID FILMS, 1978, 52 (03) :415-443

[10]

OBATA T, 1981, J NUCL MATER, V103, P283

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