SYNTHESIS OF TITANIUM CARBONITRIDE FILMS BY PHYSICAL VAPOR-DEPOSITION AND THEIR STRUCTURE

[1] ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1385 - &

[2] BUNSHAH RF, 1977, THIN SOLID FILMS, V45, P435

[3] WEAR-RESISTANT COATINGS FOR BEARING APPLICATIONS [J]. WEAR, 1978, 48 (02) : 225 - 236

[4] KATOH A, J VAC SOC JPN

[5] Movchan B. A., 1969, Fizika Metallov i Metallovedenie, V28, P653

[6] NAKAMURA K, 1975, KINZOKU, P35

[7] WEAR RESISTANT COATING OF CEMENTED CARBIDES AND HIGH-SPEED STEELS BY CHEMICAL VAPOR-DEPOSITION [J]. WEAR, 1978, 48 (02) : 291 - 299

[8] ENHANCED ARE APPARATUS AND TIN SYNTHESIS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (04): : 1007 - 1012

[1] ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1385 - &

[2] BUNSHAH RF, 1977, THIN SOLID FILMS, V45, P435

[3] WEAR-RESISTANT COATINGS FOR BEARING APPLICATIONS [J]. WEAR, 1978, 48 (02) : 225 - 236

[4] KATOH A, J VAC SOC JPN

[5] Movchan B. A., 1969, Fizika Metallov i Metallovedenie, V28, P653

[6] NAKAMURA K, 1975, KINZOKU, P35

[7] WEAR RESISTANT COATING OF CEMENTED CARBIDES AND HIGH-SPEED STEELS BY CHEMICAL VAPOR-DEPOSITION [J]. WEAR, 1978, 48 (02) : 291 - 299

[8] ENHANCED ARE APPARATUS AND TIN SYNTHESIS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (04): : 1007 - 1012