CR-POLYIMIDE AND CU-POLYIMIDE INTERFACE - CHEMISTRY AND STRUCTURE

被引：55

作者：

WHITE, RC

HAIGHT, R

SILVERMAN, BD

HO, PS

机构：

来源：

关键词：

D O I：

10.1063/1.98373

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：481 / 483

页数：3

共 9 条

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[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) : 4795 - 4800
[3] CHOU NJ, 1984, J VAC SCI TECHNOL A, V2, P751, DOI 10.1116/1.572564
[4] FEIT ED, 1982, POLYM MATERIALS ELEC, V184
[5] HAHN PO, 1985, P ELECT PACKAGING MA, P251
[6] CHEMICAL BONDING AND REACTION AT METAL POLYMER INTERFACES
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[7] SYNCHROTRON-RADIATION EXCITED CARBON 1S PHOTOEMISSION-STUDY OF CR-ORGANIC POLYMER INTERFACES
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 1046 - 1048
[8] METAL POLYIMIDE INTERFACE - A TITANIUM REACTION-MECHANISM
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 1039 - 1045
[9] MOLECULAR-ORBITAL ANALYSIS OF THE XPS SPECTRA OF PMDA-ODA POLYMIDE AND ITS POLYAMIC ACID PRECURSOR
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[J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1986, 24 (12) : 3325 - 3333