METAL POLYIMIDE INTERFACE - A TITANIUM REACTION-MECHANISM

被引：163

作者：

OHUCHI, FS

FREILICH, SC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573450

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1039 / 1045

页数：7

共 12 条

[1] PHOTOEMISSION SPECTROSCOPY STUDY OF ALUMINUM-POLYIMIDE INTERFACE
BARTHA, JW
HAHN, PO
LEGOUES, F
HO, PS
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 1390 - 1393
[2] BUCHWALTER PL, 1984, POLYIMIDES SYNTHESIS, V1, P537
[3] CHANG CC, 1974, CHARACTERIZATION SOL, P536
[4] CHOU NJ, 1984, J VAC SCI TECHNOL A, V2, P751, DOI 10.1116/1.572564
[5] AN XPS AND TEM STUDY OF INTRINSIC ADHESION BETWEEN POLYIMIDE AND CR FILMS
CHOU, NJ
DONG, DW
KIM, J
LIU, AC
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (10) : 2335 - 2340
[6] CHEMICAL BONDING AT THE POLYIMIDE SURFACE
HAHN, PO
RUBLOFF, GW
HO, PS
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 756 - 760
[7] HAHN PO, 1985, MATER RES SOC S P, V40, P251
[8] HENRICH VE, 1978, PHYS REV B, V17, P4120
[9] CHEMICAL BONDING AND REACTION AT METAL POLYMER INTERFACES
HO, PS
HAHN, PO
BARTHA, JW
RUBLOFF, GW
LEGOUES, FK
SILVERMAN, BD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 739 - 745
[10] SYNTHESIS OF UNSYMMETRICAL OLEFINS BY TITANIUM(0) INDUCED MIXED CARBONYL COUPLING - SOME COMMENTS ON MECHANISM OF PINACOL REACTION
MCMURRY, JE
KREPSKI, LR
[J]. JOURNAL OF ORGANIC CHEMISTRY, 1976, 41 (24) : 3929 - 3930