PROPERTIES OF A 4-ELECTRODE ADJUSTABLE ELECTRON-MIRROR AS AN ABERRATION CORRECTOR

被引：19

作者：

SHAO, ZF ^{[1
]}

WU, XD ^{[1
]}

机构：

[1] STANFORD UNIV,DEPT ELECT ENGN,EDWARD L GINZTON LAB,STANFORD,CA 94305

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 04期

关键词：

D O I：

10.1063/1.1141216

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A numerical analysis of a four-electrode electron mirror is presented. It is shown that this system can have adjustable aberration coefficients, opposite to the aberrations of conventional electron optical systems. Therefore, it is possible to use such an electron mirror as an aberration corrector to further improve resolutions in electron microscopes.

引用

页码：1230 / 1235

页数：6

共 26 条

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