EFG PROCESS APPLIED TO GROWTH OF SILICON RIBBONS

被引:76
作者
SWARTZ, JC [1 ]
SUREK, T [1 ]
CHALMERS, B [1 ]
机构
[1] TYCO LABS INC,WALTHAM,MA 02154
关键词
D O I
10.1007/BF02655405
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:255 / 279
页数:25
相关论文
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