INTEGRATED-CIRCUIT METROLOGY WITH CONFOCAL OPTICAL MICROSCOPY

被引：6

作者：

BENNETT, SD

LINDOW, JT

SMITH, IR

机构：

来源：

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1986年 / 320卷 / 1554期

关键词：

D O I：

10.1098/rsta.1986.0119

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：307 / 313

页数：7

共 13 条

[1]

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[2]

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[3]

BULLIS WM, 1982, VLSI ELECTRONICS MIC, V3, P301

[4] OBSERVATION OF OPTICAL SIGNATURES OF MATERIALS [J].

COX, IJ ;

HAMILTON, DK ;

SHEPPARD, CJR .

APPLIED PHYSICS LETTERS, 1982, 41 (07) :604-606

[5] 3-DIMENSIONAL SURFACE MEASUREMENT USING THE CONFOCAL SCANNING MICROSCOPE [J].

HAMILTON, DK ;

WILSON, T .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1982, 27 (04) :211-213

[6]

HAMILTON DK, 1982, J APPL PHYS, V53, P5321

[7] PHASE SENSITIVE SCANNING OPTICAL MICROSCOPE [J].

JUNGERMAN, RL ;

HOBBS, PCD ;

KINO, GS .

APPLIED PHYSICS LETTERS, 1984, 45 (08) :846-848

[8] PRECISE PHASE MEASUREMENTS WITH THE ACOUSTIC MICROSCOPE [J].

LIANG, KK ;

BENNETT, SD ;

KHURIYAKUB, BT ;

KINO, GS .

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (02) :266-273

[9] IMAGE-FORMATION IN SCANNING MICROSCOPES WITH PARTIALLY COHERENT SOURCE AND DETECTOR [J].

SHEPPARD, CJR ;

WILSON, T .

OPTICA ACTA, 1978, 25 (04) :315-325

[10]

SHEPPARD CJR, 1978, OPTIK, V51, P361

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