IMAGING-PLATE PLANE-WAVE X-RAY TOPOGRAPHY OF LOCAL LATTICE DISTRIBUTION DUE TO GROWTH STRIATIONS IN SILICON-CRYSTALS

被引：9

作者：

MAEKAWA, I ^{[1
]}

KUDO, Y ^{[1
]}

KOJIMA, S ^{[1
]}

KAWADO, S ^{[1
]}

ISHIKAWA, T ^{[1
]}

机构：

[1] UNIV TOKYO, FAC ENGN, BUNKYO KU, TOKYO 113, JAPAN

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 23期

关键词：

D O I：

10.1063/1.109163

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A newly developed imaging-plate plane-wave x-ray topography (IPPWT) method has been successfully applied to the quantitative analysis of local lattice distortion due to growth striations in magnetic-field-applied Czochralski silicon single crystals. IPPWT was found to possess sufficient spatial resolution to accurately measure variations of growth-induced local lattice distortions (DELTAd/d and DELTAalpha. The advantageous features of IPPWT, in comparison with conventional photographic-plate plane-wave x-ray topography, are a wide latitude in x-ray exposure conditions, better x-ray intensity linearity for performing quantitative analysis, and convenience in image processing and data handling.

引用

页码：2980 / 2982

页数：3

共 10 条

[1] ABE T, 1985, VLSI ELECT MICROSTRU, V12, P3
[2] A STORAGE PHOSPHOR DETECTOR (IMAGING PLATE) AND ITS APPLICATION TO DIFFRACTION STUDIES USING SYNCHROTRON RADIATION
AMEMIYA, Y
SATOW, Y
MATSUSHITA, T
CHIKAWA, J
WAKABAYASHI, K
MIYAHARA, J
[J]. TOPICS IN CURRENT CHEMISTRY-SERIES, 1988, 147 : 121 - 144
[3] CZOCHRALSKI SILICON-CRYSTALS GROWN IN A TRANSVERSE MAGNETIC-FIELD
HOSHI, K
ISAWA, N
SUZUKI, T
OHKUBO, Y
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (03) : 693 - 700
[4] X-RAY TOPOGRAPHY WITH HIGHLY COLLIMATED BEAM AT PHOTON FACTORY
ISHIKAWA, T
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) : 2490 - 2493
[5] Ishikawa T., 1991, HDB SYNCHROTRON RAD, V3, P63
[6] KAWADO S, 1991, DEFECTS SILICON, V2, P65
[7] Meieran E. S., 1980, Characterization of Crystal Growth Defects by X-Ray Methods. Proceedings of the NATO Advanced Study Institute on Characterization of Crystal Growth Defects by X-Ray Methods, P1
[8] MORI N, 1990, J ELECTRON MICROSC, V39, P433
[9] OIKAWA T, 1990, J ELECTRON MICROSC, V39, P437
[10] COMPUTED RADIOGRAPHY UTILIZING SCANNING LASER STIMULATED LUMINESCENCE
SONODA, M
TAKANO, M
MIYAHARA, J
KATO, H
[J]. RADIOLOGY, 1983, 148 (03) : 833 - 838

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