FREQUENCY-DOMAIN (1KHZ-40GHZ) CHARACTERIZATION OF THIN-FILMS FOR MULTICHIP-MODULE PACKAGING TECHNOLOGY

被引：7

作者：

LIU, WT

COCHRANE, S

WU, XM

SINGH, PK

ZHANG, X

KNORR, DB

MCDONALD, JF

RYMASZEWSKI, EJ

BORREGO, JM

LU, TM

机构：

[1] Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy

来源：

ELECTRONICS LETTERS | 1994年 / 30卷 / 02期

关键词：

THIN FILM CAPACITORS; DIELECTRIC THIN FILMS;

D O I：

10.1049/el:19940085

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Parallel plate capacitors for the broadband dielectric characterisation of both high (amorphous BaTiO3 and amorphous TaOx) and low (parylene) dielectric constant thin films were fabricated at low temperature (<200 degrees C). The dielectric constant and loss tangent were dermined through the measurement of C, G and the S parameters of the capacitors. These thin film dielectrics exhibit no dispersion in the frequency range 1kHz-40GHz.

引用

页码：117 / 118

页数：2

共 7 条

[1]

BAKOGLU HB, 1990, CIRCUITS INTERCONNEC, P281

[2]

DOANE DA, 1993, MULTICHIP MODULE TEC, P525

[3] DOMAIN BOUNDARY MOTION IN FERROELECTRIC CRYSTALS AND THE DIELECTRIC CONSTANT AT HIGH FREQUENCY [J].