FORMATION OF BN BY NITROGEN ION-IMPLANTATION OF BORON DEPOSITS

被引：17

作者：

GUZMAN, L

MARCHETTI, F

CALLIARI, L

SCOTONI, I

FERRARI, F

机构：

来源：

THIN SOLID FILMS | 1984年 / 117卷 / 01期

关键词：

D O I：

10.1016/0040-6090(84)90194-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L63 / L66

页数：4

共 11 条

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