APPLICATION OF METAL-INSULATOR METAL THIN-FILMS AS COLD CATHODES TO THE BAYARD-ALPERT GAUGE

被引：7

作者：

MITSUI, T ^{[1
]}

SHIGEHARA, T ^{[1
]}

机构：

[1] VACUUM ELECTR,MACHIDA,TOKYO 194,JAPAN

来源：

VACUUM | 1990年 / 41卷 / 7-9期

关键词：

D O I：

10.1016/0042-207X(90)94097-A

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

As a non-heated cold electron emitter, a metal-insulator-metal (MIM) film (Al-Al2O3-Au) was first applied to the Bayard-Alpert gauge (BAG). Using the BAG equipped with a MIM-cold cathode (MCC) pressures were measured in N2, H-2, O2, CO2 and air, using lock-in-amplifiers. The guage was ascertained to work as a pressure gauge. MCC naturally functions at much lower temperature (< 100-degrees-C). The emission current was found to flow in high and ultra-high vacuum (10(-8 Pa). The emission current was modulated by impressing a low ac voltage (10 V) on a MIM film. It can read pressure correctly in noisy surroundings (high energy accelerators).

引用

页码：1802 / 1804

页数：3

共 15 条

[1] ENHANCED COLD-CATHODE EMISSION USING COMPOSITE RESIN CARBON COATINGS [J].