X-RAY PHASE LENS DESIGN AND FABRICATION

被引：20

作者：

CEGLIO, NM ^{[1
]}

HAWRYLUK, AM ^{[1
]}

SCHATTENBURG, M ^{[1
]}

机构：

[1] MIT,SUBMICRON STRUCT LAB,CAMBRIDGE,MA 02139

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.582730

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1285 / 1288

页数：4

共 12 条

[1] SPACE AND TIME RESOLVED SOFT-X-RAY SPECTRA USING X-RAY TRANSMISSION GRATINGS
CEGLIO, NM
HAWRYLUK, AM
PRICE, RH
[J]. OPTICAL ENGINEERING, 1983, 22 (02) : 241 - 246
[2] CEGLIO NM, 1977, 8 P INT C XRAY OPT M
[3] CEGLIO NM, 1980, ANN NY ACAD SCI, V342, P65
[4] GOLD TRANSMISSION GRATINGS WITH SUBMICROMETER PERIODS AND THICKNESSES GREATER-THAN 0.5 MU-M
HAWRYLUK, AM
CEGLIO, NM
PRICE, RH
MELNGAILIS, J
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 897 - 900
[5] Henke B. L., 1982, Atomic Data and Nuclear Data Tables, V27, P1, DOI 10.1016/0092-640X(82)90002-X
[6] PHASE ZONE PLATES FOR X-RAYS AND EXTREME UV
KIRZ, J
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (03) : 301 - 309
[7] Schmahl G, 1980, Ann N Y Acad Sci, V342, P368, DOI 10.1111/j.1749-6632.1980.tb47234.x
[8] SCHMAHL G, 1982, P C HIGH RESOLUTION, V316
[9] X-RAY ZONE PLATES FABRICATED USING ELECTRON-BEAM AND X-RAY-LITHOGRAPHY
SHAVER, DC
FLANDERS, DC
CEGLIO, NM
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1626 - 1630
[10] SMITH HI, 1981, LOW ENERGY XRAY DIAG, P223