X-RAY ZONE PLATES FABRICATED USING ELECTRON-BEAM AND X-RAY-LITHOGRAPHY

被引：39

作者：

SHAVER, DC

FLANDERS, DC

CEGLIO, NM

SMITH, HI

机构：

[1] UNIV CALIF LAWRENCE LIVERMORE LAB,LIVERMORE,CA 94550

[2] MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570258

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1626 / 1630

页数：5

共 8 条

[1]

BARBEE TW, 1978, APR P WORKSH INSTR S, P26

[2] TRANSMISSION GRATING EFFICIENCIES FOR WAVELENGTHS BETWEEN 5.4 A AND 44.8 A [J].

BRAUNINGER, H ;

PREDEHL, P ;

BEUERMANN, KP .

APPLIED OPTICS, 1979, 18 (03) :368-373

[3]

CEGLIO NM, UNPUBLISHED

[4] POLYIMIDE MEMBRANE X-RAY LITHOGRAPHY MASKS - FABRICATION AND DISTORTION MEASUREMENTS [J].

FLANDERS, DC ;

SMITH, HI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :995-997

[5] SMOOTH MULTILAYER FILMS SUITABLE FOR X-RAY MIRRORS [J].

HAELBICH, RP ;

SEGMULLER, A ;

SPILLER, E .

APPLIED PHYSICS LETTERS, 1979, 34 (03) :184-186

[6] SOFT-X-RAY IMAGING ZONE PLATES WITH LARGE ZONE NUMBERS FOR MICROSCOPIC AND SPECTROSCOPIC APPLICATIONS [J].

NIEMANN, B ;

RUDOLPH, D ;

SCHMAHL, G .

OPTICS COMMUNICATIONS, 1974, 12 (02) :160-163

[7]

RUDOLPH D, UNPUBLISHED

[8] APPLICATION OF MOIRE TECHNIQUES IN SCANNING ELECTRON-BEAM LITHOGRAPHY AND MICROSCOPY [J].

SMITH, HI ;

CHINN, SR ;

DEGRAFF, PD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1262-1265

← 1 →