PRACTICAL OPTIMIZATION OF ELECTROSTATIC LENSES

被引:15
作者
ADRIAANSE, JP [1 ]
VANDERSTEEN, HWG [1 ]
BARTH, JE [1 ]
机构
[1] DELFT UNIV TECHNOL,DEPT APPL PHYS,PARTICLE OPT RES GRP,LORENTZWEG 1,2628 CJ DELFT,NETHERLANDS
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.584622
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:651 / 666
页数:16
相关论文
共 11 条
[1]  
Gill P. E., 1981, PRACTICAL OPTIMIZATI
[2]  
GLATZEL U, 1988, OPTIK, V79, P15
[3]  
Press W., 1986, NUMERICAL RECIPES FO
[4]  
SCHEINFEIN M, 1986, OPTIK, V74, P154
[5]  
SLINGERLAND HN, 1987, THESIS DELFT U TECHN
[6]   OPTIMUM DESIGN OF ELECTROSTATIC LENSES [J].
SZILAGYI, M ;
SZEP, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03) :953-957
[7]   ELECTROSTATIC SPLINE LENSES [J].
SZILAGYI, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (02) :273-278
[8]   PROCEDURE FOR ELECTRON AND ION LENS OPTIMIZATION [J].
SZILAGYI, M ;
YAKOWITZ, SJ ;
DUFF, MO .
APPLIED PHYSICS LETTERS, 1984, 44 (01) :7-9
[9]   ELECTRON-OPTICAL SYNTHESIS AND OPTIMIZATION [J].
SZILAGYI, MN .
PROCEEDINGS OF THE IEEE, 1985, 73 (03) :412-418
[10]  
VANDERMAST KD, 1987, DELFT U TECHNOLOGY I