ELECTRIC-POTENTIAL DISTRIBUTION EFFECTS IN DC DIODE SPUTTERING DISCHARGES

被引：1

作者：

CZEKAJ, D ^{[1
]}

HOLLMANN, EK ^{[1
]}

KOZIREV, AB ^{[1
]}

VOLPYAS, VA ^{[1
]}

ZAYTSEV, AG ^{[1
]}

机构：

[1] VI LENIN ELECT ENGN INST,LENINGRAD 197022,USSR

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 36卷 / 03期

关键词：

D O I：

10.1016/0168-583X(89)90674-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：316 / 318

页数：3

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