ELECTRIC-POTENTIAL DISTRIBUTION EFFECTS IN DC DIODE SPUTTERING DISCHARGES

被引:1
作者
CZEKAJ, D [1 ]
HOLLMANN, EK [1 ]
KOZIREV, AB [1 ]
VOLPYAS, VA [1 ]
ZAYTSEV, AG [1 ]
机构
[1] VI LENIN ELECT ENGN INST,LENINGRAD 197022,USSR
关键词
D O I
10.1016/0168-583X(89)90674-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:316 / 318
页数:3
相关论文
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