MICROMACHINED CORNER CUBE REFLECTORS AS A COMMUNICATION LINK

被引：13

作者：

GUNAWAN, DS

LIN, LY

PISTER, KSJ

机构：

[1] Department of Electrical Engineering, University of California, Los Angeles, Los Angeles, California, 90024-1594

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 47卷 / 1-3期

关键词：

CORNER CUBE REFLECTOR;

D O I：

10.1016/0924-4247(94)00966-L

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper proposes using a micromachined corner cube reflector to transmit data digitally by modulating reflected light intensity. Corner cube reflectors ranging in size from 100 to 200 mu m have been built using hinged polysilicon plates. The reflectivity of polysilicon has been measured to be 24% and the total reflected power from the corner cube has been measured to be between 1 to 2% of the incident power. Orthogonality between plates is within roughly 8 mrad. Reflection from individual polysilicon plates has been modulated using electrostatic actuation with an applied voltage as low as 8 V.

引用

页码：580 / 583

页数：4

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