A SOFT-X-RAY MICROSCOPE USING AN IMAGING DETECTOR

被引：2

作者：

INOUE, S

OGAWA, Y

UEDA, K

SUMIYA, M

TAKIGAWA, T

AOKI, S

机构：

[1] TOSHIBA CO LTD,MFG ENGN LAB,ISOGO KU,YOKOHAMA 235,JAPAN

[2] UNIV TSUKUBA,INST APPL PHYS,TSUKUBA 305,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 01期

关键词：

Imaging detector; Photocathode; Semiconductor inspection; Soft X-ray microscope; Spot diagram; Wolter-type mirror;

D O I：

10.1143/JJAP.29.L176

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An X-ray microscope, consisting of a Wolter-type mirror and an imaging detector, was constructed. The configuration of the mirror was optimized by the ray-tracing procedure. The resolution of the imaging detector was estimated to be better than 1 µm from the spot diagram of the electron lenses. A photocathode made of a CsI layer as a photoemitter and a SiNxmembrane as a support for the CsI layer is presented. The fundamental performance of the X-ray microscope has been evaluated, and its resolution has been estimated to be better than 2 µm. © 1990 IOP Publishing Ltd.

引用

页码：L176 / L178

页数：3