NITROGEN IMPLANTATION OF METALS

被引：31

作者：

ANTTILA, A

KEINONEN, J

UHRMACHER, M

VAHVASELKA, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 04期

关键词：

D O I：

10.1063/1.334504

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1423 / 1425

页数：3

共 21 条

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[3] DIFFUSION OF NITROGEN IN ALPHA-ZR AND ALPHA-HF
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[4] DIFFUSION OF NITROGEN IN ALPHA-TI
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[5] FORMATION OF CHEMICAL COMPOUNDS BY ION-BOMBARDMENT OF THIN TRANSITION-METAL FILMS
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[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 32 (01): : 53 - 61
[7] STRUCTURAL-CHANGES IN IRON AFTER NITROGEN AND CARBON ION-IMPLANTATION
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[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 66 (1-2): : 101 - 108
[8] DUCKWORTH RG, 1978, THIN SOLID FILMS, V63, P289
[9] CONTROL OF TC FOR NIOBIUM BY N ION-IMPLANTATION
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (10) : 1853 - 1857
[10] ABSOLUTE CROSS-SECTIONS FOR BEAM-SURFACE REACTIONS - N-2+ ON TI FROM 0.25 TO 3.0 KEV KINETIC-ENERGY
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RABALAIS, JW
[J]. JOURNAL OF CHEMICAL PHYSICS, 1981, 74 (04) : 2247 - 2255

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