PHASE-DIAGRAMS OF RHEED INTENSITY OSCILLATIONS ACCOMPANYING THE INCORPORATION OF AS INTO VERY THIN AL FILMS - POSSIBLE MELTING-POINT LOWERING OF THIN AL FILM

被引:3
作者
OHTA, K
KOJIMA, T
NAKAGAWA, T
机构
[1] Electrotechnical Laboratory, Tsukuba, Ibaraki, 305
关键词
D O I
10.1016/0022-0248(91)90287-F
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report experiments for recovery of the specular beam intensity in reflection high-energy electron diffraction (RHEED) after exposure to As flux over a pre-deposited Al film of thickness equivalent to several monolayers on a GaAs or AlAs substrate in a temperature range between room temperature and 700-degrees-C. Four types of recoveries have been found. They form a phase diagram with the substrate temperature and the Al film thickness as parameters. The phase diagram suggests that the thinner Al film on a substrate has lower melting temperature than the bulk melting point of Al if we assume that As atoms do not enhance diffusion of Al atoms in a solid Al film.
引用
收藏
页码:509 / 515
页数:7
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