CVD GROWTH AND PROPERTIES OF PHOSLON DIELECTRIC FILMS

被引：5

作者：

LI, PC

HSIA, LC

机构：

来源：

关键词：

D O I：

10.1149/1.2108581

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：366 / 372

页数：7

共 11 条

[1]

CORBRIDGE DEC, 1980, STUDIES INORGANIC CH, V2

[2]

COWHER ME, 1984, ELECTROCHEMICAL SOC, V84, P537

[3]

FURUKAWA Y, 1985, OCT EL SOC M LAS VEG

HIROTA, Y ;

KOBAYASHI, T .

[5]

REJEIS L, 1976, 5TH K MOL NAUCHN RAB, P20

[6]

REJEIS M, 1976, LATV PSR ZINAT AKAD, V261

[7]

STEGER E, 1964, Z ANORG ALLG CHEM, V332, P5

[8] DIELECTRIC PROPERTIES OF PHOSPHORUS NITRIDE FILMS [J].

VEPREK, S ;

ROOS, J .

VEPREK, S ;

IQBAL, Z ;

BRUNNER, J ;

SCHARLI, M .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (03) :527-547

[10]

1983, IBM TECH DISCLOSURE, V26