THERMAL-PROPERTIES OF C/H-GROWN, C/H/O-GROWN, C/H/N-GROWN AND C/H/X-GROWN POLYCRYSTALLINE CVD DIAMOND

被引：49

作者：

BACHMANN, PK ^{[1
]}

HAGEMANN, HJ ^{[1
]}

LADE, H ^{[1
]}

LEERS, D ^{[1
]}

WIECHERT, DU ^{[1
]}

WILSON, H ^{[1
]}

FOURNIER, D ^{[1
]}

PLAMANN, K ^{[1
]}

机构：

[1] UNIV PARIS 06,ESPCI,INSTRUMENTAT LAB,CNRS,UPR A0005,F-75005 PARIS,FRANCE

来源：

关键词：

THERMAL CONDUCTIVITY; GAS PHASE; VAPOR GROWTH; PHASE DIAGRAMS;

D O I：

10.1016/0925-9635(94)05229-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Over 60 CVD diamond films with thicknesses in the range 2-600 mu m, grown from C/H, C/H/O, C/H/Cl and C/H/N gas mixtures by microwave plasma CVD, combustion flame synthesis and r.f. plasma torch CVD, were compared in terms of their thermal, morphological, Raman and luminescence data. Correlation diagrams reveal that the content of sp(2)-hybridized carbon is the main factor determining the thermal properties of the films. Other parameters, e.g. thickness, crystallinity and defects, only influence the thermal performance by changing the phase purity. The presence of oxygen and nitrogen in the CVD gas phase restricts the thermal conductivity of the films to values well. below the 2200 +/- 200 W m(-1) K-1 achieved for polycrystalline films, 250 mu m thick, grown from methane and hydrogen. Diamond films with thicknesses of less than 4 mu m and thermal conductivities of more than 700 W m(-1) K-1 were grown from C/H and C/H/O mixtures.

引用

页码：820 / 826

页数：7

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