FLOW PHENOMENA IN CHEMICAL VAPOR-DEPOSITION OF THIN-FILMS

被引：62

作者：

JENSEN, KF ^{[1
]}

EINSET, EO ^{[1
]}

FOTIADIS, DI ^{[1
]}

机构：

[1] UNIV MINNESOTA, DEPT CHEM ENGN & MAT SCI, MINNEAPOLIS, MN 55455 USA

来源：

ANNUAL REVIEW OF FLUID MECHANICS | 1991年 / 23卷

关键词：

MIXED CONVECTION; DOUBLE-DIFFUSIVE PHENOMENA; THERMAL AND SOLUTAL CONVECTION; FINITE-ELEMENT FLOW SIMULATIONS; MATERIALS PROCESSING; HORIZONTAL MOCVD REACTORS; MONTE-CARLO SIMULATION; GROWTH-RATE UNIFORMITY; ROTATING-DISK; TRANSPORT PHENOMENA; MASS-TRANSFER; GAS-PHASE; DIRECTIONAL SOLIDIFICATION; THERMAL-CONVECTION; MATHEMATICAL-MODEL;

D O I：

10.1146/annurev.fluid.23.1.197

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

引用

页码：197 / 232

页数：36

共 99 条

[1] CONVECTION AND SEGREGATION IN DIRECTIONAL SOLIDIFICATION OF DILUTE AND NON-DILUTE BINARY-ALLOYS - EFFECTS OF AMPOULE AND FURNACE DESIGN
ADORNATO, PM
BROWN, RA
[J]. JOURNAL OF CRYSTAL GROWTH, 1987, 80 (01) : 155 - 190
[2] [Anonymous], 1986, Numerical analysis of parameterized nonlinear equations
[3] BAURLE D, 1986, CHEM PROCESSING LASE
[4] Bird G.A., 1976, MOL GAS DYNAMICS
[5] MONTE-CARLO SIMULATION OF GAS-FLOWS
BIRD, GA
[J]. ANNUAL REVIEW OF FLUID MECHANICS, 1978, 10 (08) : 11 - 31
[6] Bloem J., 1978, CURRENT TOPICS MAT S, V1, P147
[7] 3-DIMENSIONAL THERMAL-CONVECTION IN CZOCHRALSKI MELT
BOTTARO, A
ZEBIB, A
[J]. JOURNAL OF CRYSTAL GROWTH, 1989, 97 (01) : 50 - 58
[8] THE INFLUENCE OF AXIAL DIFFUSION ON CONVECTIVE HEAT AND MASS-TRANSFER IN A HORIZONTAL CVD REACTOR
BULSARI, AB
ORAZEM, ME
RICE, JG
[J]. JOURNAL OF CRYSTAL GROWTH, 1988, 92 (1-2) : 294 - 310
[9] Bunshah RointanF., 1982, DEPOSITION TECHNOLOG
[10] NONLINEAR PROPERTIES OF THERMAL-CONVECTION
BUSSE, FH
[J]. REPORTS ON PROGRESS IN PHYSICS, 1978, 41 (12) : 1929 - &

← 1 2 3 4 5 6 7 8 9 10 →