PROJECTION IMAGE TRANSMISSION OF PERIODIC STRUCTURES IN SPATIALLY INCOHERENT RADIATION

被引：9

作者：

ARISTOV, VV

ERKO, AI

MARTYNOV, VV

机构：

[1] Acad of Sciences of the USSR, Inst, of Problems of Microelectronics, Technology & Superpure, Acad of Sciences of the USSR, Inst of Problems of Microelectronics Technology & Superpure Mater

来源：

OPTICS COMMUNICATIONS | 1985年 / 53卷 / 03期

关键词：

PERIODIC STRUCTURES - PROJECTION IMAGE TRANSMISSION - RESOLUTION DETERIORATION - SPATIAL COHERENCE MODULATION - X-RAY SOURCE;

D O I：

10.1016/0030-4018(85)90323-2

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：159 / 163

页数：5

共 10 条

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[5] Cowley J.M., 1975, DIFFRACTION PHYS, V1
[6] SPATIAL PERIOD DIVISION - A NEW TECHNIQUE FOR EXPOSING SUB-MICROMETER-LINEWIDTH PERIODIC AND QUASI-PERIODIC PATTERNS
FLANDERS, DC
HAWRYLUK, AM
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1949 - 1952
[7] LAU EFFECT AND COHERENCE THEORY
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[J]. OPTICS COMMUNICATIONS, 1979, 31 (01) : 4 - 8
[8] JAHUS J, 1979, OPT COMMUN, V28, P263
[9] REHU V, 1981, AIP C P, V75
[10] EXPLANATION OF THE LAU EFFECT BASED ON COHERENCE THEORY
SUDOL, R
THOMPSON, BJ
[J]. OPTICS COMMUNICATIONS, 1979, 31 (02) : 105 - 110

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