(BA+SR)/TI RATIO DEPENDENCE OF THE DIELECTRIC-PROPERTIES FOR (BA.05SR0.5)TIO3 THIN-FILMS PREPARED BY ION-BEAM SPUTTERING

被引：124

作者：

YAMAMICHI, S

YABUTA, H

SAKUMA, T

MIYASAKA, Y

机构：

[1] Fundamental Research Laboratories, NEC Corporation, Kawasaki 216

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 13期

关键词：

D O I：

10.1063/1.111818

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

(Ba0.5Sr0.5)TiO3 thin films were prepared by ion beam sputtering from powder targets with (Ba + Sr)/Ti ratios ranging from 0.80 to 1.50. All of the perovskite (Ba,Sr)TiO3 films were single phase except for the film with a (Ba + Sr)/Ti ratio of 1.41. The dielectric constant values notably depended on the (Ba + Sr)/Ti ratio for films thicker than 70 nm. The highest dielectric constant of 580 was achieved for the 5% (Ba + Sr) rich film. This (Ba + Sr)/Ti ratio dependence was diminished by the thickness dependence for thinner films. The grain sizes for the 9% (Ba + Sr) rich film and for the 6% (Ba + Sr) poor film ranged from 70 to 100 nm and from 30 to 60 nm, respectively. This grain size difference could explain why slightly A-site rich (Ba,Sr)TiO3 films have a larger dielectric constant than A-site poor films.

引用

页码：1644 / 1646

页数：3

共 7 条

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