GORKOV-GOODMAN RELATION IN LOW-K ALUMINUM FILMS

被引:10
作者
GRAY, KE [1 ]
机构
[1] ARGONNE NATL LAB, ARGONNE, IL 60439 USA
关键词
D O I
10.1103/PhysRevB.13.3774
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:3774 / 3778
页数:5
相关论文
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