POLAROGRAPHIC-DETERMINATION OF METALLIC IMPURITIES ON LAPPED SILICON-WAFERS

被引：4

作者：

BULDINI, PL

TOPONI, A

ZINI, Q

机构：

来源：

MICROCHEMICAL JOURNAL | 1988年 / 38卷 / 02期

关键词：

D O I：

10.1016/0026-265X(88)90026-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

收藏

页码：241 / 245

页数：5

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共 7 条

[1] ANODIC-OXIDATION OF POLYSILICON
BULDINI, PL
ZINI, Q
FERRI, D
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (05) : 1062 - 1064
[2] ELIMINATION OF IRON INTERFERENCE IN THE DIFFERENTIAL PULSE ANODIC-STRIPPING VOLTAMMETRY OF COPPER
CAMPION, JJ
[J]. ANALYTICA CHIMICA ACTA, 1984, 162 (AUG) : 385 - 387
[3] DOMENICI M, 1984, ASTM STP, V850
[4] DIFFERENTIAL PULSE POLAROGRAPHIC-DETERMINATION OF TRACES OF IRON IN SOLAR-GRADE SILICON
FERRI, D
BULDINI, PL
[J]. ANALYTICA CHIMICA ACTA, 1981, 126 (MAY) : 247 - 251
[5] SPECTROPHOTOMETRIC EVALUATION OF PHOSPHORUS PROFILES IN SILICON
LANZA, P
BULDINI, PL
[J]. ANALYTICA CHIMICA ACTA, 1979, 104 (01) : 139 - 144
[6] Meites L, 1963, HDB ANAL CHEM
[7] THE SOLUTION OF IRON IN SILICON
WEBER, E
RIOTTE, HG
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (03) : 1484 - 1488