NEW HIGH-CURRENT LOW-ENERGY ION-SOURCE

被引:6
作者
HARA, T [1 ]
HAMAGAKI, M [1 ]
SANDA, A [1 ]
AOYAGI, Y [1 ]
NAMBA, S [1 ]
机构
[1] SAITAMA UNIV,FAC ENGN,URAWA,SAITAMA 338,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1986年 / 25卷 / 03期
关键词
D O I
10.1143/JJAP.25.L252
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L252 / L253
页数:2
相关论文
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