FORMATION OF MOLYBDENUM NITRIDE FILMS BY ION-BEAM AND VAPOR-DEPOSITION METHOD

被引:24
作者
FUJIMOTO, F
NAKANE, Y
SATOU, M
KOMORI, F
OGATA, K
ANDOH, Y
机构
[1] GOVT IND RES INST, IKEDA, OSAKA 563, JAPAN
[2] UNIV TOKYO, DEPT PHYS, TOKYO 113, JAPAN
[3] VICTOR CO JAPAN, YAMATO, KANAGAWA 242, JAPAN
[4] NISSIN ELECT CO LTD, KYOTO 615, JAPAN
关键词
D O I
10.1016/S0168-583X(87)80159-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:791 / 796
页数:6
相关论文
共 15 条
  • [11] SATOU M, 1981, P INT WORKSHOP PROFE, P349
  • [12] SATOU M, 1982, 6TH P S ION SOURC IO, P425
  • [13] PREPARATION AND SUPERCONDUCTING PROPERTIES OF MON AND MOC IN FORM OF WIRES
    SAUR, EJ
    SCHECHINGER, HD
    RINDERER, L
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1981, 17 (01) : 1029 - 1031
  • [14] TERADA N, 1986, IN PRESS ADV CRYOGEN, V31
  • [15] ZHAO YX, 1983, SOLID STATE COMMUN, V45, P281, DOI 10.1016/0038-1098(83)90481-7